{"id":81,"date":"2025-02-16T10:25:35","date_gmt":"2025-02-16T09:25:35","guid":{"rendered":"https:\/\/atri2.mtf.stuba.sk\/?page_id=81"},"modified":"2025-02-16T10:25:35","modified_gmt":"2025-02-16T09:25:35","slug":"technologie","status":"publish","type":"page","link":"https:\/\/atri.mtf.stuba.sk\/?page_id=81","title":{"rendered":"Technol\u00f3gie"},"content":{"rendered":"

LABORAT\u00d3RIUM I\u00d3NOV\u00ddCH TECHNOL\u00d3GI\u00cd<\/strong><\/h3>\n

I\u00f3nov\u00e9 technol\u00f3gie umo\u017e\u0148uj\u00fa synt\u00e9zu nov\u00fdch materi\u00e1lov, ktor\u00e9 nie je mo\u017en\u00e9 vytvori\u0165 klasick\u00fdmi met\u00f3dami. Dopuj\u00faci prvok je do substr\u00e1tu vn\u00e1\u0161an\u00fd bombardovan\u00edm i\u00f3nov\u00fdm zv\u00e4zkom, \u010do umo\u017e\u0148uje dosahova\u0165 koncentr\u00e1cie vysoko nad tzv. limit rozpustnosti prvku v substr\u00e1te. Interakcie i\u00f3nov s l\u00e1tkou maj\u00fa za n\u00e1sledok modifik\u00e1ciu \u0161trukt\u00fary substr\u00e1tu, mie\u0161anie rozhran\u00ed vrstiev (napr. za \u00fa\u010delom lep\u0161ieho previazania) a \u010fal\u0161ie fascinuj\u00face efekty. Na\u0161e vybavenie umo\u017e\u0148uje pracova\u0165 prakticky so v\u0161etk\u00fdmi prvkami periodickej tabu\u013eky v energetickom rozsahu od 40keV do 50MeV.<\/p>\n

 <\/p>\n

<\/span>TECHNICK\u00c9 PARAMETRE<\/h4>\n

Tandemov\u00fd ur\u00fdch\u013eova\u010d – 6MV Tandetron<\/strong><\/p>\n

Vybaven\u00fd s experiment\u00e1lnou koncovou stanicou pre i\u00f3nov\u00fa implant\u00e1ciu (ve\u013ekos\u0165 substr\u00e1tov do \u2205100 mm) s riaden\u00edm teploty substr\u00e1tu (od -195 \u00b0C do 800 \u00b0C) a koncovou stanicou pre anal\u00fdzu pomocou i\u00f3nov\u00e9ho zv\u00e4zku.<\/p>\n

500kV Implanter<\/strong><\/p>\n

Vybaven\u00fd experiment\u00e1lnou koncovou stanicou pre i\u00f3nov\u00fa implant\u00e1ciu (ve\u013ekos\u0165 substr\u00e1tov do \u2205100 mm) s riaden\u00edm teploty substr\u00e1tu (od -195 \u00b0C do 800 \u00b0C) a polo-automatickou koncovou stanicou s manipul\u00e1torom pre implant\u00e1ciu substr\u00e1tov do \u2205200 mm.<\/p>\n

 <\/p>\n

LABORAT\u00d3RIUM PLAZMOV\u00ddCH TECHNOL\u00d3GI\u00cd<\/h3>\n

Zameran\u00e9 na: diagnostiku plazmy (charakteristika optick\u00fdch a elektrick\u00fdch vlastnost\u00ed), meranie parametrov plazmy (napr. elektr\u00f3nov\u00e1 a i\u00f3nov\u00e1 hustota), \u0161t\u00fadium pohybu elektr\u00f3nov a i\u00f3nov v plazme, optick\u00fa emisn\u00fa spektroskopia i\u00f3nov.<\/p>\n

<\/h4>\n

TECHNICK\u00c9 PARAMETRE<\/h4>\n

Magnetr\u00f3nov\u00e9 napra\u0161ovanie Cluster-System ST 75 DC\/RF
\n<\/strong><\/p>\n

Plazmov\u00fd v\u00fdkon 300 W, V\u00fdbojov\u00fd pr\u00fad 1 A, Frekvencia 13,56 MHz,\u00a0 DC jednotka s 3 kruhov\u00fdmi ter\u010dami s \u2205 75mm a RF jednotkou s 3 kruhov\u00fdmi ter\u010dami s \u220575 mm. Substr\u00e1t s maxim\u00e1lnym priemerom vzorky 100 mm a maxim\u00e1lnou v\u00fd\u0161kou 10 mm. Ohrev vzorky maxim\u00e1lne 500\u00b0C a rot\u00e1cioa sustr\u00e1tu maxim\u00e1lne 20rpm.<\/p>\n

PIII \u2013 Plazmou podporovan\u00e1 i\u00f3nov\u00e1 implant\u00e1cia<\/strong><\/p>\n

Plazmov\u00fd v\u00fdkon 1 000 W, Frekvencia RF ant\u00e9ny 13,56 MHz, Ur\u00fdchluj\u00face nap\u00e1tie (nap\u00e4tie na vzorke) -20 \/ -35 kV s frekvenciou pulzu 1 – 100 \u00b5s. Substr\u00e1t s vertik\u00e1lnym posunom 30 cm a rot\u00e1cioa sustr\u00e1tu 0 – 30 rpm.<\/p>\n

Elipsometer (M 2000)<\/strong><\/p>\n

Mo\u017enos\u0165 in-situ aj ex-situ merania, Meranie hr\u00fabky vrstiev: od sup-nm do desiatok mikrometrov pre transparentn\u00e9 vrstvy, \u0160irokospektr\u00e1lne meranie, Vlnov\u00e1 d\u013a\u017eka 245 \u2013 1000 nm.<\/p>\n

\u00a0<\/strong><\/p>\n

LABORAT\u00d3RIUM PO\u010c\u00cdTA\u010cOV\u00c9HO MODELOVANIA<\/h3>\n

Oddelenie fyziky a ch\u00e9mie pod ktor\u00e9 spad\u00e1 Laborat\u00f3rium po\u010dita\u010dov\u00e9ho modelovania vyu\u017e\u00edva v\u00fdpo\u010dtov\u00e9 zdroje HPC klastra Slovenskej technickej Univerzity a Slovenskej akad\u00e9mie vied.<\/p>\n

 <\/p>\n

LABORAT\u00d3RI\u00c1 PRE AUTOMATIZ\u00c1CIU<\/h3>\n

Oddelenie automatiz\u00e1cie, informatiky a aplikovanej matematiky vyu\u017e\u00edva dostupn\u00e9 laborat\u00f3ria vybudovan\u00e9 v r\u00e1mci projektu Univerzitn\u00e9ho vedeck\u00e9ho parku. Ide o Laborat\u00f3rium riadiacich syst\u00e9mov, Laborat\u00f3rium ICIM a Laborat\u00f3rium integr\u00e1cie informa\u010dn\u00fdch a riadiacich syst\u00e9mov.<\/p>\n","protected":false},"excerpt":{"rendered":"

LABORAT\u00d3RIUM I\u00d3NOV\u00ddCH TECHNOL\u00d3GI\u00cd I\u00f3nov\u00e9 technol\u00f3gie umo\u017e\u0148uj\u00fa synt\u00e9zu nov\u00fdch materi\u00e1lov, ktor\u00e9 nie je mo\u017en\u00e9 vytvori\u0165 klasick\u00fdmi met\u00f3dami. Dopuj\u00faci prvok je do substr\u00e1tu vn\u00e1\u0161an\u00fd bombardovan\u00edm i\u00f3nov\u00fdm zv\u00e4zkom, \u010do umo\u017e\u0148uje dosahova\u0165 koncentr\u00e1cie vysoko …<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"template-fullwidth.php","meta":{"_eb_attr":"","footnotes":""},"class_list":["post-81","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/81","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=81"}],"version-history":[{"count":1,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/81\/revisions"}],"predecessor-version":[{"id":83,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/81\/revisions\/83"}],"wp:attachment":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=81"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}