{"id":125,"date":"2025-02-16T10:41:52","date_gmt":"2025-02-16T09:41:52","guid":{"rendered":"https:\/\/atri2.mtf.stuba.sk\/?page_id=125"},"modified":"2025-02-16T10:41:52","modified_gmt":"2025-02-16T09:41:52","slug":"plazmove-technologie","status":"publish","type":"page","link":"https:\/\/atri.mtf.stuba.sk\/?page_id=125","title":{"rendered":"Plazmov\u00e9 technol\u00f3gie"},"content":{"rendered":"<p><img decoding=\"async\" src=\"https:\/\/atri.mtf.stuba.sk\/images\/slideshow\/plasma.jpg\" alt=\"plasma\" \/><\/p>\n<h2 class=\"western\"><\/h2>\n<h2 class=\"western\"><span lang=\"sk-SK\">Plazmou podporovan\u00e1 i\u00f3nov\u00e1 implant\u00e1cia (PIII)<\/span><\/h2>\n<p class=\"western\"><span lang=\"sk-SK\">Technika PBII bola vyvinut\u00e1 v&nbsp;snahe z\u00edska\u0165 vy\u0161\u0161ie pr\u00fadov\u00e9 hustoty i\u00f3nov, z&nbsp;d\u00f4vodu dosiahnutia podstatne krat\u0161\u00edch \u010dasov implant\u00e1cie, ako aj mo\u017enosti implantovania komplikovan\u00fdch tvarov povrchov, \u010do nie j<\/span><span lang=\"sk-SK\">e mo\u017en\u00e9 dosiahnu\u0165 pri implant\u00e1ci\u00ed pomocou i\u00f3nov\u00e9ho zv\u00e4zku. \u00da\u010dinnos\u0165 PBII je v&nbsp;porovnan\u00ed so \u0161tandardn\u00fdm implanta\u010dn\u00fdm procesom lep\u0161ia najm\u00e4 pre n\u00edzkoenergetick\u00e9 implant\u00e1cie s&nbsp;vysok\u00fdmi d\u00e1vkami.<\/span><\/p>\n<p class=\"western\"><span lang=\"sk-SK\">Pri PBII je vzorka ponoren\u00e1 v&nbsp;plazme obsahuj\u00facej po\u017eadovan\u00e9 druhy i\u00f3nov, kde vysokonap\u00e4\u0165ov\u00e9 pulzy s\u00fa aplikovan\u00e9 priamo na substr\u00e1t. I\u00f3ny s\u00fa extrahovan\u00e9 z&nbsp;plazmy a s\u00fa implantovan\u00e9 do povrchu materi\u00e1lu.<\/span><\/p>\n<p class=\"western\"><span lang=\"sk-SK\">Pr\u00fadov\u00e1 hustota i\u00f3nov\u00e9ho l\u00fa\u010da z\u00e1vis\u00ed od parametrov plazmy a predp\u00e4tia a jeho hodnota je r\u00e1dovo (1 \u2013 10) mA\/cm2. Vysok\u00e9 nap\u00e4tie v&nbsp;impulznom re\u017eime sa pou\u017e\u00edva na zn\u00ed\u017eenie teploty substr\u00e1tu ako aj na kontrolu nab\u00edjania. Typick\u00e9 d\u013a\u017eky pulzov s\u00fa v&nbsp;rozmedz\u00ed od 2 do 100 \u00b5s pri frekvenci\u00e1ch nieko\u013eko 100 Hz a\u017e 3 kHz. Teplota substr\u00e1tu m\u00f4\u017ee by\u0165 kontrolovan\u00e1 zmenou implanta\u010dn\u00fdch parametrov a m\u00f4\u017ee by\u0165 v&nbsp;rozmedz\u00ed od izbovej teploty do 600\u00b0C bez \u010fal\u0161ieho zahrievania. Samoregula\u010dn\u00e1 kontrola n\u00e1boja dosiahnut\u00e1 striedav\u00fdm pri\u0165ahovan\u00edm i\u00f3nov a elektr\u00f3nov umo\u017e\u0148uje opracov\u00e1va\u0165 nielen vodiv\u00e9 materi\u00e1ly, ale aj izolanty.<\/span><\/p>\n<p class=\"western\">\u00a0<strong><span lang=\"sk-SK\">Aplik\u00e1cie plazmou podporovanej i\u00f3novej implant\u00e1cie<img fetchpriority=\"high\" decoding=\"async\" src=\"https:\/\/atri.mtf.stuba.sk\/images\/ion_impl.png\" width=\"300\" height=\"213\" \/><\/span><\/strong><\/p>\n<ul>\n<li><span lang=\"sk-SK\">Dopovanie krem\u00edka fosforom a b\u00f3rom pomocou met\u00f3dy PBII pre fotovoltaick\u00e9 \u010dl\u00e1nky<\/span><\/li>\n<li><span lang=\"sk-SK\">Supertvrd\u00e9 povrchy: Nitridick\u00e9 vrstvy b\u00f3ru a\u00a0tit\u00e1nu<\/span><\/li>\n<li><span lang=\"sk-SK\">Povrchov\u00e1 ochrana tit\u00e1nu a TiAl zliatin: Ochrana TiAl proti vysokoteplotnej oxid\u00e1cii a progres\u00edvne povlaky pre Ti a TiAl zliatiny<\/span><\/li>\n<li><span lang=\"sk-SK\">Biomateri\u00e1ly: Nanopor\u00e9zne kovov\u00e9 materi\u00e1ly, tribologick\u00e9 ochrann\u00e9 povlaky, antibakteri\u00e1lne povrchy, biokompatibiln\u00e9 povrchy a bari\u00e9rov\u00e9 vrstvyNitrid\u00e1cia nehrdzavej\u00facej ocele a hlin\u00edka.<\/span><\/li>\n<li><span lang=\"sk-SK\">Nitrid\u00e1cia nehrdzavej\u00facej ocele a hlin\u00edka.<\/span><\/li>\n<\/ul>\n<h2><\/h2>\n<p>&nbsp;<\/p>\n<h2 class=\"western\"><span lang=\"sk-SK\">Reakt\u00edvne magnetr\u00f3nov\u00e9 napra\u0161ovanie<\/span><\/h2>\n<p><span lang=\"sk-SK\">Reakt\u00edvne magnetr\u00f3nov\u00e9 napra\u0161ovanie je popul\u00e1rna a osved\u010den\u00e1 technika na v\u00fdrobu tenk\u00fdch vrstiev a povlakov ako oxidy, nitridy a karbidy. V&nbsp;r\u00e1mci procesu plazmovej depoz\u00edcie s\u00fa i\u00f3ny arg\u00f3nu poch\u00e1dzaj\u00face z&nbsp;plazmov\u00e9ho v\u00fdboja ur\u00fdch\u013eovan\u00e9 smerom ku kovov\u00e9mu ter\u010d\u00edku. Dopad i\u00f3nov na ter\u010d\u00edk sp\u00f4sobuje s\u00e9riu zr\u00e1\u017eok medzi at\u00f3mami ter\u010d\u00edka a doch\u00e1dza k&nbsp;vyrazeniu t\u00fdchto at\u00f3mov. Tento proces vyr\u00e1\u017eania at\u00f3mov je zn\u00e1my ako napra\u0161ovanie. V&nbsp;re\u017eime reakt\u00edvnej depoz\u00edcie sa m\u00f4\u017eu prida\u0165 do procesu mal\u00e9 mno\u017estv\u00e1 reakt\u00edvneho plynu ako kysl\u00edk \u010di dus\u00edk. Tieto reaguj\u00fa s&nbsp;napra\u0161ovan\u00fdm materi\u00e1lom a vytv\u00e1raj\u00fa po\u017eadovan\u00fa vrstvu zl\u00fa\u010den\u00edn na substr\u00e1te.<\/span><\/p>\n<p><span lang=\"sk-SK\">Pri tomto procese doch\u00e1dza k&nbsp;ne\u017eelan\u00e9mu efektu \u201eotr\u00e1venia\u201c ter\u010d\u00edka. Akon\u00e1hle je reakt\u00edvny plyn zaveden\u00fd do procesnej komory, reaguje aj s&nbsp;povrchmi, ako s\u00fa steny komory a odpra\u0161ovan\u00fd ter\u010d\u00edk. Intenz\u00edvna er\u00f3zia (sp\u00f4soben\u00e1 odpra\u0161ovan\u00edm) v&nbsp;magnetr\u00f3novom kan\u00e1li od\u010fa\u013euje kompletn\u00e9 \u201eotr\u00e1venie\u201c (vytv\u00e1ranie zmesi) povrchu tohto kan\u00e1lu. Otr\u00e1venie kan\u00e1lu preto zvy\u010dajne postupuje r\u00f4znymi \u0161t\u00e1diami ako funkcia parci\u00e1lneho tlaku reakt\u00edvneho plynu a \u010dasu. Po\u010diato\u010dn\u00e1 f\u00e1za je \u010dist\u00fd kovov\u00fd kan\u00e1l ter\u010d\u00edka (re\u017eim \u201ekovov\u00e9ho\u201c odpra\u0161ovania) a kone\u010dn\u00e1 f\u00e1za je \u00faplne zreagovan\u00fd povrch kan\u00e1la (re\u017eim \u201ezmes\u201c alebo \u00faplne otr\u00e1ven\u00e9 odpra\u0161ovanie). Medzietapy sa naz\u00fdvaj\u00fa prechodov\u00e9 oblasti.<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><strong>Princ\u00edp magnetr\u00f3nov\u00e9ho napra\u0161ovania:<img decoding=\"async\" src=\"https:\/\/atri.mtf.stuba.sk\/images\/magnetron_napras.png\" alt=\"magnetron napras\" \/><\/strong><\/p>\n<ul>\n<li>Pou\u017e\u00edva at\u00f3my procesn\u00e9ho plynu Ar, O<sub>2<\/sub>, N<sub>2<\/sub>\u00a0&#8230;<\/li>\n<li>Plazma vznik\u00e1 ioniz\u00e1ciou plynu, je zmesou elektricky neutr\u00e1lnych at\u00f3mov\u00a0\u00a0 a nabit\u00fdch i\u00f3nov<\/li>\n<li>Kladne nabit\u00e9 i\u00f3ny s\u00fa ur\u00fdchlen\u00e9 pomocou negat\u00edvneho predp\u00e4tia k&nbsp;ter\u010du (kat\u00f3da)<\/li>\n<li>Z ter\u010du s\u00fa vyrazen\u00e9 at\u00f3my, ktor\u00e9 vytv\u00e1raj\u00fa povlak na substr\u00e1te (an\u00f3da)<\/li>\n<li>V\u00fdsledkom je homog\u00e9nny, extr\u00e9mne hladk\u00fd povlak bez mikrokvap\u00f4\u010dok<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p><strong><span lang=\"sk-SK\">Pr\u00edklady na reakt\u00edvne napr\u00e1\u0161en\u00e9 povrchy:<\/span><\/strong><\/p>\n<ul>\n<li class=\"western\"><span lang=\"sk-SK\">zariadenia s&nbsp;OLED obrazovkou,<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">antireflexn\u00e9 vrstvy<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">prvky laserovej optiky,<\/span><span lang=\"sk-SK\">ITO-m pokryt\u00e9 sklo,<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">ITO-m pokryt\u00e1 polym\u00e9rna sie\u0165<\/span><span lang=\"sk-SK\">dekorat\u00edvne oxidov\u00e9 vrstvy,<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">z\u00e1vitn\u00edky pokryt\u00e9 TiN vrstvou,<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">fr\u00e9zovacie n\u00e1stroje pokryt\u00e9 DLC vrstvou,<\/span><\/li>\n<li class=\"western\"><span lang=\"sk-SK\">Ti-O-N vrstvou pokryt\u00fd tepeln\u00fd sol\u00e1rny panel.<\/span><\/li>\n<\/ul>\n<p><sub><strong>MAGNETR\u00d3NOV\u00c9 NAPRA\u0160OVANIE &#8211; princ\u00edp<\/strong><\/sub><\/p>\n<h2>Elipsometria<\/h2>\n<p>Elipsometria je optick\u00e1 anal\u00fdza tenk\u00fdch vrstiev, ktor\u00e1 je zameran\u00e1 na meranie optick\u00fdch vlastnost\u00ed materi\u00e1lov (index lomu, koeficient absorpcie, anizotropia, zlo\u017eenie) a hr\u00fabky vrstiev. Je to nede\u0161trukt\u00edvna met\u00f3da, ktor\u00e1 vyu\u017e\u00edva \u0161ikm\u00fd dopad monochromatick\u00e9ho svetla a je zalo\u017een\u00e1 na zmene polariz\u00e1cie svetla po odrazen\u00ed od rozhrania dvoch r\u00f4znych prostred\u00ed. Nameran\u00e9 hodnoty z\u00e1visia od optick\u00fdch vlastnost\u00ed a hr\u00fabky jednotliv\u00fdch materi\u00e1lov.\u00a0<span id=\"result_box\" class=\"\" lang=\"sk\"><span title=\"Pro slo\u017eit\u011bj\u0161\u00ed vzorek je nutn\u00e9 vytvo\u0159it numerick\u00fd model jeho optick\u00fdch vlastnost\u00ed a zm\u011bny polarizace sv\u011btla p\u0159i odrazu od vzorku.\">Pre zlo\u017eitej\u0161ie vzorky je nutn\u00e9 vytvori\u0165 numerick\u00fd model zmeny optick\u00fdch vlastnosti polariz\u00e1cie svetla pri odraze od vzorky.<\/span><span title=\"[1]\n\n\"><\/p>\n<p><\/span><span title=\"Elipsometrie nevy\u017eaduje na rozd\u00edl od spektrofotometrie referen\u010dn\u00ed m\u011b\u0159en\u00ed.\">Elipsometria nevy\u017eaduje na rozdiel od spektrofotometria referen\u010dn\u00e9 merania.\u00a0<\/span><span title=\"D\u00edky pou\u017eit\u00ed polarizovan\u00e9ho sv\u011btla je v\u00fdhodou elipsometrie mal\u00e1 citlivost v\u016f\u010di kol\u00eds\u00e1n\u00ed sign\u00e1lu a nevy\u017eaduje ochranu p\u0159ed rozpt\u00fdlen\u00fdm sv\u011btlem.\">V\u010faka pou\u017eitiu polarizovan\u00e9ho svetla je v\u00fdhodou elipsometrie mal\u00e1 citlivos\u0165 vo\u010di kol\u00edsaniu sign\u00e1lu a nevy\u017eaduje ochranu pred rozpt\u00fdlen\u00fdm svetlom.\u00a0<\/span><span title=\"Pokud je pou\u017eito v\u00edce vlnov\u00fdch d\u00e9lek, jde o spektroskopickou elipsometrii.\">Ak je pou\u017eit\u00fdch viac vlnov\u00fdch d\u013a\u017eok, ide o spektroskopick\u00f4 elipsometriu.\u00a0<\/span><span title=\"Je t\u00edm krom mo\u017enosti ur\u010den\u00ed z\u00e1vislosti optick\u00fdch vlastnost\u00ed l\u00e1tky na vlov\u00e9 d\u00e9lce tak\u00e9 mo\u017en\u00e9 velmi zv\u00fd\u0161it p\u0159esnost ur\u010den\u00ed tlou\u0161\u0165ky i zv\u011bt\u0161it obor jej\u00ed m\u011b\u0159itelnosti (na ide\u00e1ln\u00edm vzorku u spektroskopick\u00e9 elipsometrie ve viditeln\u00e9m sv\u011btle od sub-nanometrov\u00fdch tlou\u0161t\u011bk po mikrometry).\">T\u00fdm je okrem mo\u017enosti ur\u010denie z\u00e1vislosti optick\u00fdch vlastnosti l\u00e1tky na vlnovej d\u013a\u017eke, taktie\u017e mo\u017en\u00e9 zv\u00fd\u0161i\u0165 presnos\u0165 ur\u010denie hr\u00fabky l\u00e1tky a zv\u00e4\u010d\u0161i\u0165 odbor jej merate\u013enosti.<\/span><\/span><\/p>\n<h2 class=\"western\"><\/h2>\n","protected":false},"excerpt":{"rendered":"<p>Plazmou podporovan\u00e1 i\u00f3nov\u00e1 implant\u00e1cia (PIII) Technika PBII bola vyvinut\u00e1 v&nbsp;snahe z\u00edska\u0165 vy\u0161\u0161ie pr\u00fadov\u00e9 hustoty i\u00f3nov, z&nbsp;d\u00f4vodu dosiahnutia podstatne krat\u0161\u00edch \u010dasov implant\u00e1cie, ako aj mo\u017enosti implantovania komplikovan\u00fdch tvarov povrchov, \u010do nie &#8230;<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":81,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_eb_attr":"","footnotes":""},"class_list":["post-125","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/125","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=125"}],"version-history":[{"count":1,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/125\/revisions"}],"predecessor-version":[{"id":126,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/125\/revisions\/126"}],"up":[{"embeddable":true,"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=\/wp\/v2\/pages\/81"}],"wp:attachment":[{"href":"https:\/\/atri.mtf.stuba.sk\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=125"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}